[A-5-2] A New Registration Method for Continuously Moving Stage Variably Shaped Electron Beam Systems

T. Ohiwa, M. Goto, R. Yoshikawa, H. wada, T. Tojo, Y. Muraguchi (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1985.A-5-2