[A-5-2] A New Registration Method for Continuously Moving Stage Variably Shaped Electron Beam Systems

T. Ohiwa、M. Goto、R. Yoshikawa、H. wada、T. Tojo、Y. Muraguchi (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1985.A-5-2