Epitaxial Growth of AlxGa1-xN by MOVPE

Y. Koide; H. Itoh; N. Sawaki; I. Akasaki M. Hashimoto

doi:https://doi.org/10.7567/SSDM.1985.B-2-7LN

1985 Conference on Solid State Devices and Materials

1985年8月25日〜 1985年8月27日
Nippon Toshi Center, Tokyo, Japan

[B-2-7LN] Epitaxial Growth of AlxGa1-xN by MOVPE

Y. Koide、H. Itoh、N. Sawaki、I. Akasaki M. Hashimoto (1.Department of Electronics, School of Engineering, Nagoya University、2.Toyota Central R&D Laboratories Inc.)

https://doi.org/10.7567/SSDM.1985.B-2-7LN

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