1985 Conference on Solid State Devices and Materials
Aug 25, 1985 - Aug 27, 1985 Nippon Toshi Center, Tokyo, Japan
[B-3-5] Hydrogen Radical Assisted CVD of ZnSe
S. Oda, R. Kawase, I. Shimizu, H. Kokado (1.The Graduate School at Nagatsuta and Imaging Science and Engineering Laboratory, Tokyo Institute of Technology)
