1985 Conference on Solid State Devices and Materials
1985年8月25日 〜 1985年8月27日 Nippon Toshi Center, Tokyo, Japan
[B-3-5] Hydrogen Radical Assisted CVD of ZnSe
S. Oda、R. Kawase、I. Shimizu、H. Kokado (1.The Graduate School at Nagatsuta and Imaging Science and Engineering Laboratory, Tokyo Institute of Technology)
