[B-5-2] High Transconductance GaAs MESFETs Fabricated Using Sidewall-Assisted Self-Alignment Technology (SWAT)
K. Ueno、T. Furutsuka、M. Kanamori、A. Higashisaka
(1.Microelectronics Research Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1985.B-5-2