[B-5-3] Through-AIN Implantation Technology for 1.7 ns GaAs 4kX1b SRAM H. Kawata、H. Onodera、T. Shinoki、N. Yokoyama、H. Nishi (1.Fujitsu Laboratories Ltd., Atsugi) https://doi.org/10.7567/SSDM.1985.B-5-3