[B-5-3] Through-AIN Implantation Technology for 1.7 ns GaAs 4kX1b SRAM

H. Kawata, H. Onodera, T. Shinoki, N. Yokoyama, H. Nishi (1.Fujitsu Laboratories Ltd., Atsugi)

https://doi.org/10.7567/SSDM.1985.B-5-3