[B-10-2] Advanced High Mobility Polysilicon Super-thin Film Transistor (SFT) Using Solid Phase Growth

H. HAYASHI、T. NOGUCHI、T. OHSHIMA、M. NEGISHI、Y. HAYASHI (1.Research & development Dept. Semiconductor Group, SONY)

https://doi.org/10.7567/SSDM.1986.B-10-2