[B-6-1] Peripheral Capacitor Cell with Fully Recessed Isolation for Megabit DRAM

K. Tsukamoto, M. Nagatomo, Y. Okumura, T. Ogawa, Y. Matsuda, S. Osaki, T. Matsukawa (1.LSI R&D Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1986.B-6-1