[B-6-1] Peripheral Capacitor Cell with Fully Recessed Isolation for Megabit DRAM

K. Tsukamoto、M. Nagatomo、Y. Okumura、T. Ogawa、Y. Matsuda、S. Osaki、T. Matsukawa (1.LSI R&D Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1986.B-6-1