[B-7-5] A Novel EPROM Device Using Focused Boron Ion Beam Implantation

Shoji Shukuri, Yasuo Wada, Takaaki Hagiwara Kazuo Komori, Masao Tamura (1.Central Research Laboratory, Hitachi, Ltd., 2.Musashi Works, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1986.B-7-5