[B-7-5] A Novel EPROM Device Using Focused Boron Ion Beam Implantation

Shoji Shukuri、Yasuo Wada、Takaaki Hagiwara Kazuo Komori、Masao Tamura (1.Central Research Laboratory, Hitachi, Ltd.、2.Musashi Works, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1986.B-7-5