[C-5-4] Self-Aligned AlGaAs/GaAs HBTs and 35 ps LCML Ring Oscillators Fabricated by Mg and P Double Implantation

K. Morizuka, M. Asaka, N. Iizuka, K. Tsuda, J. Yoshida, J. Akagi, T. Kobayashi, Y. Ashizawa, M. Azuma (1.Toshiba Research and Development Center)

https://doi.org/10.7567/SSDM.1986.C-5-4