[C-5-4] Self-Aligned AlGaAs/GaAs HBTs and 35 ps LCML Ring Oscillators Fabricated by Mg and P Double Implantation

K. Morizuka、M. Asaka、N. Iizuka、K. Tsuda、J. Yoshida、J. Akagi、T. Kobayashi、Y. Ashizawa、M. Azuma (1.Toshiba Research and Development Center)

https://doi.org/10.7567/SSDM.1986.C-5-4