[C-7-3] A Buried P-Layer Lightly Doped Drain (BPLDD) Self- Aligned GaAs MESFET

T. Shimura, M. Noda, K. Hosogi, N. Tanino, K. Nishitani, M. Otsubo (1.LSI R&D Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1986.C-7-3