[C-7-3] A Buried P-Layer Lightly Doped Drain (BPLDD) Self- Aligned GaAs MESFET

T. Shimura、M. Noda、K. Hosogi、N. Tanino、K. Nishitani、M. Otsubo (1.LSI R&D Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1986.C-7-3