The Japan Society of Applied Physics

[A-1-1] SCC (Surrounded Capacitor Cell) Structure for DRAM

G. Fuse, K. Tateiwa, S. Odanaka, T. Yamada, I. Nakao, H. Shimoda, O. Shippou, M. Fukumoto, J. Yasui, Y. Naito, T. Ohzone (1.Matsushita Elec. Ind. Co. Ltd. Semiconductor Research Center)

https://doi.org/10.7567/SSDM.1987.A-1-1