The Japan Society of Applied Physics

[A-1-1] SCC (Surrounded Capacitor Cell) Structure for DRAM

G. Fuse、K. Tateiwa、S. Odanaka、T. Yamada、I. Nakao、H. Shimoda、O. Shippou、M. Fukumoto、J. Yasui、Y. Naito、T. Ohzone (1.Matsushita Elec. Ind. Co. Ltd. Semiconductor Research Center)

https://doi.org/10.7567/SSDM.1987.A-1-1