[A-3-5] High Performance Superthin Film Transistor (SFT) with Twin Gates

Hisao HAYASHI、Michio NEGISHI、Takefumi OHSHIMA、Takashi NOGUCHI、Yuji HAYASHI、Toshikazu MAEKAWA、Takeshi MATSUSHITA (1.R & D Department, Semiconductor Group, SONY Corp.)

https://doi.org/10.7567/SSDM.1987.A-3-5