[B-1-3] Analysis of Planar Channeling Effects on the Threshold Voltage Uniformity of GaAs MESFETs Using Stereographic Projection

Hitoshi MIKAMI、Naotaka UCHITOMI、Nobuyuki TOYODA (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1987.B-1-3