[C-1-2] MOS-FETs Fabricated by SPE-SOI Technology

K. Kusukawa, M. Moniwa, E. Murakami, M. Miyao, T. Warabisako, Y. Wada (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1987.C-1-2