[C-1-2] MOS-FETs Fabricated by SPE-SOI Technology

K. Kusukawa、M. Moniwa、E. Murakami、M. Miyao、T. Warabisako、Y. Wada (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1987.C-1-2