[C-1-4] SOI Recrystallization using a Multiply Separated Seed Structure

S. Kambayashi、T. Inoue、M. Kemmochi、I. Higashinakagawa、T. Yoshii (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1987.C-1-4