[C-1-4] SOI Recrystallization using a Multiply Separated Seed Structure

S. Kambayashi, T. Inoue, M. Kemmochi, I. Higashinakagawa, T. Yoshii (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1987.C-1-4