Photo-CVD of Tantalum Oxide Films and Their Characteristics

Yasuo TARUI; Satoshi OKA; Masahiro MATSUI; Koji YAMAGISHI; Koichi KUROIWA

doi:https://doi.org/10.7567/SSDM.1987.C-3-7

1987 Conference on Solid State Devices and Materials

1987年8月25日〜 1987年8月27日
Nippon Toshi Center, Tokyo, Japan

[C-3-7] Photo-CVD of Tantalum Oxide Films and Their Characteristics

Yasuo TARUI、Satoshi OKA、Masahiro MATSUI、Koji YAMAGISHI、Koichi KUROIWA (1.Department of Electronic Engineering, Tokyo University of Agriculture and Technology)

https://doi.org/10.7567/SSDM.1987.C-3-7

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