[C-3-7] Photo-CVD of Tantalum Oxide Films and Their Characteristics

Yasuo TARUI, Satoshi OKA, Masahiro MATSUI, Koji YAMAGISHI, Koichi KUROIWA (1.Department of Electronic Engineering, Tokyo University of Agriculture and Technology)

https://doi.org/10.7567/SSDM.1987.C-3-7