[S-II-5] Low Resistivity Tungsten/Titanium-Silicide/Silicon Contact for Submicron VLSI

Jyuro Yasui, Shin-ichi Ogawa, Takehito Yoshida, Yasuaki Terui (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1987.S-II-5