[A-8-2] Photo-Enhanced Boron-Doping in Low-Temperature Silicon Epitaxy and Its FTIR Study

S. Watanabe, T. Yamazaki, Y. Nara, T. Ito (1.FUJITSU LABORATORIES LTD., ATSUGI)

https://doi.org/10.7567/SSDM.1988.A-8-2