[B-1-4] A Reliable Profiled Lightly-Doped Drain(PLD) Cell for High Density Submicron EPROMS and Flash EEPROMS

Kuniyoshi YOSHIKAWA, Masaki SATO, Yoichi OHSHIMA (1.Semiconductor Device Engineering Laboratory, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1988.B-1-4