[C-1-3] Crystal Defect Study of Solid Phase Epitaxially Grown Si Surrounded by SiO2 Structures

Eiichi Murakami、Masao Tamura、Kikuo Kusukawa、Masahiro Moniwa、Terunori Warabisako、Masanobu Miyao (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1988.C-1-3