[C-1-3] Crystal Defect Study of Solid Phase Epitaxially Grown Si Surrounded by SiO2 Structures

Eiichi Murakami, Masao Tamura, Kikuo Kusukawa, Masahiro Moniwa, Terunori Warabisako, Masanobu Miyao (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1988.C-1-3