[C-1-4] Recrystallization Mechanism for Solid Phase Growth of Poly-Si Films on Quartz Substrates

Akira NAKAMURA, Fumiaki EMOTO, Eiji FUJII, Yasuhiro UEMOTO Atsuya YAMAMOTO, Kohji SENDA, Gota KANO (1.Electronics Research Laboratory Matsushita Electronics Corporation)

https://doi.org/10.7567/SSDM.1988.C-1-4