[C-3-3] Si/Si1-xGex Strained Layer Superlattices Grown by Photo-Chemical Vapor Deposition at 250℃

Akira YAMADA, Ying JIA, Makoto KONAGAI, Kiyoshi TAKAHASHI (1.Dept. of Electrical and Electronic Engineering, Tokyo Inst. of Technol.)

https://doi.org/10.7567/SSDM.1988.C-3-3