[D-2-2] Thermally Enhanced Reactive Ion Beam Etching of InGaAsP

H. Yamada, Y. Inomoto, M. Kitamura, I. Mito, K. Asakawa (1.Opto-Electronics Res. Labs., NEC Corporation)

https://doi.org/10.7567/SSDM.1988.D-2-2