Low Resistance Refractory Ohmic Contact to p+GaAs and p+AlGaAs TLM Determination of p+GaAs/p+AlGaAs Contact Resistance

P. Rabinzohn; T. Usagawa; M. Kobayashi; T. Mishima; A. Yamane

doi:https://doi.org/10.7567/SSDM.1988.D-2-4

[D-2-4] Low Resistance Refractory Ohmic Contact to p+GaAs and p+AlGaAs TLM Determination of p+GaAs/p+AlGaAs Contact Resistance

P. Rabinzohn、T. Usagawa、M. Kobayashi、T. Mishima、A. Yamane (1.Central Research Laboratory, Hitachi Ltd.、2.Exchange Researcher from Philips Research Organization)

https://doi.org/10.7567/SSDM.1988.D-2-4

1988 International Conference on Solid State Devices and Materials

[D-2-4] Low Resistance Refractory Ohmic Contact to p+GaAs and p+AlGaAs TLM Determination of p+GaAs/p+AlGaAs Contact Resistance