[D-2-4] Low Resistance Refractory Ohmic Contact to p+GaAs and p+AlGaAs TLM Determination of p+GaAs/p+AlGaAs Contact Resistance

P. Rabinzohn, T. Usagawa, M. Kobayashi, T. Mishima, A. Yamane (1.Central Research Laboratory, Hitachi Ltd., 2.Exchange Researcher from Philips Research Organization)

https://doi.org/10.7567/SSDM.1988.D-2-4