[D-8-3] New VPE Method of AlGaAs by Direct Reaction between AlCl3, GaCl3 and AsH3/H2

H. Yamaguchi、R. Kobayashi、Y. Jin、F. Hasegawa (1.Institute of Materials Science, University of Tsukuba)

https://doi.org/10.7567/SSDM.1988.D-8-3