[D-9-6] Generation Mechanism for Defects in ZnSe MOCVD Epi-Layers and Bulk Crystals

K. Hirahara、T. Uemoto、M. Kawachi、A. Kamata、T. Beppu (1.Toshiba Research and Development Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1988.D-9-6