In situ Observation of Voiding in Aluminum Metallization by High Voltage Electron Microscopy

H. Okabayashi; A. Tanikawa; H. Mori; H. Fujita

doi:https://doi.org/10.7567/SSDM.1988.LA-6-3

[LA-6-3] In situ Observation of Voiding in Aluminum Metallization by High Voltage Electron Microscopy

H. Okabayashi、A. Tanikawa、H. Mori、H. Fujita (1.Microelectronics Research Laboratories, NEC Corp.、2.Research Center for Ultra-High Voltage Electron Microscopy, Osaka University)

https://doi.org/10.7567/SSDM.1988.LA-6-3

1988 International Conference on Solid State Devices and Materials

[LA-6-3] In situ Observation of Voiding in Aluminum Metallization by High Voltage Electron Microscopy