[LA-6-3] In situ Observation of Voiding in Aluminum Metallization by High Voltage Electron Microscopy

H. Okabayashi, A. Tanikawa, H. Mori, H. Fujita (1.Microelectronics Research Laboratories, NEC Corp., 2.Research Center for Ultra-High Voltage Electron Microscopy, Osaka University)

https://doi.org/10.7567/SSDM.1988.LA-6-3