[S-I-9] Submicron Superconducting Lines Fabricated from Sputtered Y-Ba-Cu-O Films

H. Tsuge, S. Matsui, N. Matsukura, Y. Kojima, Y. Wada (1.Microelectronics Res. Labs., Fundamental Res. Labs., NEC Corporation)

https://doi.org/10.7567/SSDM.1988.S-I-9