[S-II-7] Early Stage of Silicon Oxidation Studied by in situ X-ray Photoelectron Spectroscopy

Masaru TAKAKURA、Tsuyoshi OGURA、Tsukasa HAYASHI、Masataka HIROSE (1.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1988.S-II-7