[S-II-8] In-depth Profiling of SiO2/Si-Interface Electronic Structure Using Low-Energy Electron Energy Loss Spectroscopy

Nahomi Aoto, Eiji Ikawa, Nobuhiro Endo, Yukinori Kurogi (1.Microelectronics Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1988.S-II-8