[S-IIIB-7] Aluminum Deposition from Weekly-Excited Metalorganic Source by Hybrid-Excitation CVD

Kazuya MASU, Jun SAKURAI, Nobuyuki SHIGEEDA, Kazuo TSUBOUCHI Nobuo MIKOSHIBA, Yosihisa TAKEUTI (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1988.S-IIIB-7