Aluminum Deposition from Weekly-Excited Metalorganic Source by Hybrid-Excitation CVD

Kazuya MASU; Jun SAKURAI; Nobuyuki SHIGEEDA; Kazuo TSUBOUCHI Nobuo MIKOSHIBA; Yosihisa TAKEUTI

doi:https://doi.org/10.7567/SSDM.1988.S-IIIB-7

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜 1988年8月26日
Keio Plaza Hotel, Tokyo, Japan

[S-IIIB-7] Aluminum Deposition from Weekly-Excited Metalorganic Source by Hybrid-Excitation CVD

Kazuya MASU、Jun SAKURAI、Nobuyuki SHIGEEDA、Kazuo TSUBOUCHI Nobuo MIKOSHIBA、Yosihisa TAKEUTI (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1988.S-IIIB-7

▲