[A-1-3] Reduction of Internal Stress by Compositional Gradient Layer Inserted between TiSi2 and Si

Tomonobu HATA, Masanobu Tsuchitani, Kenji Kamiya, Susumu Horita (1.Faculty of Technology, Kanazawa University)

https://doi.org/10.7567/SSDM.1989.A-1-3