Digital CVD of SiO2

Masayuki NAKANO; Hideaki KAWAMOTO; Akiyoshi NAGATA; Masataka HIROSE; Yasuhiro HORIIKE

doi:https://doi.org/10.7567/SSDM.1989.A-3-2

1989 Conference on Solid State Devices and Materials

1989年8月28日〜 1989年8月30日
Nippon Toshi Center, Tokyo, Japan

[A-3-2] Digital CVD of SiO2

Masayuki NAKANO、Hideaki KAWAMOTO、Akiyoshi NAGATA、Masataka HIROSE、Yasuhiro HORIIKE (1.Department of Physical Electronics, Faculty of Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1989.A-3-2

▲