[C-2-2] Local Stress Analysis Methods Using a Micro Focused X-ray Spectrometer and Computer Simulations for ULSIs

Naoki Yamamoto、Shinji Sakata (1.Central Research Laboratory, Hitachi, Ltd.、2.Mechanical Engineering Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1989.C-2-2