[B-3-1] A Triple-Level Interconnection Technology for High Speed 16 Kb GaAs SRAM

M. Noda, S. Matsue, M. Sakai, K. Sumitani, H. Nakano, T. Oku, H. Makino, K. Nishitani, M. Otsubo (1.Optoelectronic and Microwave Devices R & D Lab., 2.LSI R & D Lab. Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1990.B-3-1